Improve Semiconductor Capital Equipment Accuracy and Simultaneously Improve Speed and Throughput
20+
years of additive manufacturing and semiconductor expertise
1 - 2 nm
improvement in semiconductor equipment accuracy
5X
stabilization improvement demonstrated

Process More Wafers and Achieve Higher Lifecycle Value with Increased Machine Speed and Uptime

Semiconductor Applications for Capital Equipment

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  • Wafer Table Thermal Management

    Maximize heat transfer efficiency and improve semiconductor capital equipment throughput and accuracy. Optimized cooling channels and surface patterns dramatically improve surface temperatures and thermal gradients (<4 mK) while reducing time constants (<1.5 s), which enhances system speed and accuracy.

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  • Manifold Fluid Flow Optimization

    Design and manufacture superior-performing manifolds with optimized flow to reduce pressure drop, mechanical disturbances, and vibration. Replace multipart assemblies with monolithic parts for increased reliability, improved manufacturing, and yield.

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  • Flexure and Structural Optimization

    Semiconductor lithography, wafer processing, and test equipment rely on structural parts that move fast while maintaining positional accuracy. Improve kinematic and static performance with structural optimization, lightweighting, and part consolidation of optical assembly flexures and mechanisms.

    Part courtesy of VDL

"3D Systems' technology transfer and consulting approach has enabled us to support our customers with their design and engineering challenges. We can better help our customers scale their ideas down to keep them printable and bring the benefits of additive manufacturing to their application."
Adwin Kannekens, Sales Director, Wilting
  • Wilting Uses Metal Additive Manufacturing to Improve Semiconductor Equipment

    Learn how Netherlands-based manufacturer Wilting brought advanced metal additive manufacturing expertise in-house to improve semiconductor equipment performance and productivity.

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Semiconductor Solutions that Solve Challenges

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  • Application Development

    Through our Application Innovation Group, we leverage years of semiconductor and metal additive manufacturing expertise to help find optimized solutions for your applications. The support we provide enables an engineering and designing approach that repeatedly meets strict requirements.

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  • Metal Additive Capabilities

    With our combination of metal hardware, software, and materials, we offer solutions with unprecedented design flexibility, economics, and reliability that traditional manufacturing cannot match.

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  • Production Capability

    With our production facilities, we can be your agile manufacturing arm, helping you transition from prototype to production, while offering increased supply chain capacity and flexibility. We also offer on-demand printing services available to you 24/7.

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  • Technology Transfer

    We help semiconductor OEMs and suppliers establish their own metal additive capabilities that reduce costs and ramp times. Through hands-on training and consultation—and the transfer of prequalified manufacturing processes to your site—our dedicated team works with you across every step, from pre-production to full-scale volume production.

The Experience and Technology to Gain a Competitive Advantage

  • Design Flexibility

    Optimally design, rapidly iterate, and manufacture components with complex features, including wafer tables with conformal cooling channels, part-consolidated end effectors, and advanced kinematic couplings and flexures for optical components. 

  • Performance and Productivity

    Produce more wafers by improving semiconductor equipment accuracy, speed, reliability, and throughput. Realize performance benefits in critical parts and subsystems, including thermal management, optimal fluid flow, lightweighting, and part consolidation.

  • High Quality and Accuracy for Clean Room Environments

    Our metal additive solutions ensure high material quality and part accuracy, producing parts in an inert atmosphere with a steady, ultra-low oxygen level — coupled with proprietary processes for optimal particle cleanliness. This results in metal parts that meet clean room requirements and are fit for use in high vacuum environments.

  • Metal AM Expertise and Capability

    Establish your own metal additive manufacturing capabilities and quickly scale to production volumes while partnering with us to develop new concepts/prototypes.

  • Scalability and Risk Reduction

    Our manufacturing facilities offer increased capacity, flexibility, and reduced inventory. We can help eliminate supply chain risks for OEMs through technology transfer by replicating our manufacturing processes and qualifying your suppliers.

Talk to an Expert

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  • Application Innovation Group

    Our team can help you solve your most difficult design and production challenges with additive manufacturing solutions. Together we’ll identify your needs, working with you to optimize your designs, prototype, validate and define a manufacturing flow.